High purity sputter coater targets

Sputter coating is a widely used technique for depositing thin layers of conductive metal onto non-conducting (or semiconducting) specimens or surfaces prior to observation with a scanning electron microscope (SEM). Sputter coating is also used in a diverse range of thin film applications.

Sputter coater targets are available in a wide range of metals. Some sputtering targets can be relatively expensive due to the high purity of the precious metals which require multiple refining steps. For most sputter coater metals a purity of 99.99%, or close to, is required to avoid artefacts, either during SEM imaging or with EDX analysis.

Sputtering targets

Labtech disc-type sputter coater targets are made using high purity metal foils and are available with diameters of: 60, 57, 54, 50, 38, 24 and 19mm
We offer annular sputtering targets for the Quorum/VG/Fisons SC7640 SEM sputter coaters
Disc-type sputtering targets are used in most makes and models of SEM sputter coater
Most modern sputter coaters use a clamping ring to hold the target into the sputtering head. Some older sputter coaters use a sputtering target assembly where the sputtering target material is bonded to a backing plate using silver or indium-loaded adhesive
Use the sputter coater target selection table (below) to determine the target size for your sputter coater. If not known, please measure the target in your sputter coater

Labtech sputter coater targets are compatible with a wide range of makes and models of bench top sputter coaters, including: Agar/Cressington, Bal-Tec, Denton, Edwards, Emitech, EMS, Emscope, Gatan, Hitachi, HHV Ltd,ISI, JEOL, Leica, Polaron/Bio-rad/VG/Fisons/Thermo, Quorum Technologies and SPI. Disc-type targets are available in diameters: 62mm,60mm, 57mm, 54mm, 50mm, 38mm, 24mm and 19mm. See the target identification chart below. For some older models an annular (ring type) sputtering target is required.

Sputtering targets can also be used for cryo-SEM and cryo-FIB/SEM preparaton systems. 24mm diameter targets are available for a range of cryo-SEM and cryo-FIB/SEM preparation systems: Bio-Rad E7400 and LT7400, Quorum PP2000, PP2000T, PP3000T and PP3010T, VG MicroTech, Fisons and Thermo models PP2000 and PP2000T. As well as cryo-SEM system from Oxford Instrument/Gatan.

If you are looking for a new sputter coater or carbon coater see the technology-leading Safematic CCU-010.

Choosing a sputter coater target best suited for your SEM application

It is worth stressing that the sputtering target material originally installed with your sputter coater might not now be best choice for current applications. Our SEM sputter target application guide below gives a listing of the merits of different sputtering metals. If you are not sure what style and size of sputtering target is required for your sputter coater, please refer to the coater target identification chart below. Then select the required metal from Ordering Information at the bottom of the page. Included in our range are the popular 57mm diameter sputter coater targets used in Quorum and Agar/Cressington SEM sputter coaters.

SEM sputtering target metal guide

Sputter target selection charts by manufacturer and model

Manufacturer	Models	Diameter (Ø) mm
Manufacturer	Models	62	60	57	54	50	38	24	19
Agar Scientific/Cressington	108 manual, 108auto, 108auto, SE 208HR sputter coater. Available targets			X
Bal-Tec	SCD 005, 040, 050, 500, MED 010, MED 020 sputter coaters. Available targets.				X
Bio-Rad / Emscope	SC500 and SC500A. Target metal mounted on 58mm diameter backing plate. Available targets.
Bio-Rad	SC5200 automatic sputter coater, SC502 mini sputter coater. Available targets.			X
Cressington	108 manual, 108auto, 108auto, SE 208HR sputter coater. Available targets			X
Cressington	308HR and 328UHR. Available targets.						X
Denton	Desk II, III, IV, V sputter coaters. Available targets.		X
Edwards	150B and Scancoat sputter coaters. Available targets.		X
Emitech	SC7620, SC7610, K575X, Q150 sputter coaters. Available targets.			X
	K500X, K550X, K650X. Mounted on backing holders. Available targets.		X
	K575XD, K675X, K675XD turbo pumped sputter coaters. Available targets.			X
EMS	150R, 300R, SC7620 sputter coaters. Available targets.			X
Gatan	681, 682 PECS, 685 PECS II ion beam coaters. Available targets.								X
Gatan/Hexland/Oxford	ALTO2500, ALTO2100 and CT1500 cryo-SEM systems. Available targets							X
Hitachi	Hitachi MC 1000 sputter coater. Available targets.	X
HHV Ltd	BT150, BT300 sputter coaters. Available targets.				X
JEOL	Smart Coater, JFC-1200, 1300, 1400, 1600, JFC-2300HR coaters. Available targets.					X
Leica	ACE 200, & 600, EM SCD 005, 050, 500 EM,MED 020 coaters. Available targets.				X
Polaron, Bio-Rad, Fisons, VG, Thermo	PS3, E5000, E5200, E5400, 5800, SC7610, SC502, SC7620 rotary pumped sputter coaters. Available targets			X
Quorum	Q150R, Q150T, SC7620, Q300R, Q300T sputter coaters. Available targets.			X
Quorum, Bio-rad, VG, Thermo	E7400, LT7400, PP2000, PP3000, PP3010T cryo-SEM systems. Available targets.							X
Safematic	CCU-010 HV, CCU-010 LV sputter coaters. Available targets.				X
SPI Supplies	SPI Modular sputter coater. Available targets.			X
SPI Supplies	SPI Super sputter coater. Available targets					X

Annular targets are only used with the following older models of sputter coaters:

Polaron/Bio-rad: E5100/E5150 and SC510/SC510
Fisons/VG/Thermo/Quorum: SC7640 and SC7680
The above annular target coaters operate at rotary pump vacuum levels and will only sputter non-oxidising (noble) metals.

The sputtering target material is attached to a threaded aluminium support ring and is supplied as a complete assembly. Note: the sputtering metal is not bonded to the support ring, but crimped into the inner and outer recesses of the support ring using special tooling.

Makes and models using annular sputtering targets

Quorum/Bio-rad/VG/Thermo

E5100, E5150, SC510, SC515, SC7640, SC7680

82mm OD, 60mm ID. Mounted on a threaded backing ring. All models are low vacuum coaters and designed for non-oxidising (noble) metals only. Available targets

Sputter coater target pricing

Whilst we offer very competitive pricing on all sputter coater targets, our prices will vary from time to time due to fluctuations of the market prices of metals. For this reason we do not display prices online but kindly ask that you contact us for a quotation.

Ordering information

Select coater make/model and then metal required. For older sputter coaters not listed under company, please check target size (Identification Charts above) and then select required sputting metal from list (below)

If you cannot find the target (type, thickness or metal type) you are looking for please contact us (sales@labtech.com) and we will try to meet your needs

Cressington/Agar 108 and 208 sputter coaters (57mm)

Cressington/Agar 308R and 328UHR deposition systems (38mm)

Denton Desk I, II, III, IV, V sputter coaters

Edwards 150B and Scancoat sputter coaters

Emitech K500X/K550X and K650X coaters

Emitech/Quorum K575X turbo sputter coaters (57mm)

Emscope/Bio-Rad SC500 & SC500A sputter coaters

Gatan/Oxford Instruments/Hexland cryo-SEM systems

Gatan ion bean coaters (19mm)

Hitachi MC 1000 coater (62mm)

JEOL sputter coaters (50mm)

Leica and Baltec sputter coaters (54mm)