Kleindiek substages and linear tables
Labtech offers the full range of precision substages and linear tables from Kleindiek Nanotechnik. These stages are designed to provide higher precision than the standard SEM/FIB stages.
Available in a standard version as well as versions for use in UHV and at low temperatures.
For full specifications please see each individual stage.
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E5AT five axis eucentric stage x,y,z,r travel with +/- 90 deg tilt and encoders |
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x and y travel |
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x and y travel. Encoder option. UHV option. |
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x,y and z travel. Encoders. UHV option. |
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x,y and z travel. UHV version |
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x,y, z and r travel. UHV version. |
SEM stages,substages,SEM substage