Special offer - Delivery now £4.99 when ordered onlineMCS series magnification calibration standards
EM-Tec MCS series magnification calibration standards from Micro to Nano are unique, cost effective, wide ranging SEM calibration standards. They can be used for magnification calibration or critical dimension measurements in table top SEM, standard SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems.
Two types of calibration ranges for the EM-Tec MCS calibration standards are available, both standard with certificates of traceability or optionally with an individual certificate of calibration:
- EM-Tec MCS-1 with a scale ranging from 2.5mm to 1µm - ideal for table top and compact SEMs and cover 10x to 20,000x magnifications. Available as a traceable or fully certified version.
- EM-Tec MCS-0.1 with a scale ranging from 2.5mm down to 100nm - ideal for SEM, FESEM and FIB systems and cover 10x to 200,000 magnifications. Available as a traceable or fully certified version.
The Micro to NanoEM-Tec MCS-0.1 calibration standard is an excellent replacement for the discontinued SIRA calibration standard (which was using only 0.51 and 0.463µm features) with added advantages. Compatible feature sizes for the SIRA standard are 50µm (5 x 10µm) and 0.5µm (500nm).
EM-Tec MCS series are made using state-of-the-art MEMS manufacturing techniques with high contrast chromium deposited lines for the larger features and gold-over-chromium for smaller features below 2.5µm The gold layer ensures an optimum signal-to-noise ratio for calibration purposes.
Advantages of the EM-Tec MCS series are:
- Unprecedented precision over the full calibration range
- All features in one single ultra flat plane
- Metal on silicon with excellent signal to noise ratio
- Wider range of features to accurately calibrate low, medium and high magnification ranges
- Compatible with both SE and BSE imaging
- Fully conductive materials
- Easy to convert feature sizes
- Can be cleaned with plasma cleaning
- All NIST traceable or optionally certified
please click here for specifications and instructions for use
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Substrate |
525µm thick boron doped ultra-flat wafer with <100> orientation |
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Conductive |
Excellent: 5-10 Ohm resistivity |
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Pattern size |
2.5 x 2.5mm |
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Chip size |
3.5 x 3.5mm (unmounted) |
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Features MCS-1 |
2.5, 1.0 and 0.5mm. 250, 100, 10, 5, 2.5 and 1µm |
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Features MCS-0.1 |
with additional 500, 250 and 100nm |
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Features material |
50nm chromium for feature sizes 2.5mm to 2.5µm |
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Traceable uniformity |
0.2% or better |
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Certified uniformity |
0.03% |
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Traceable uncertainty |
0.7% or better |
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Certified uncertainty |
0.09% |
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Traceability |
Wafer level NIST traceability: average date measured on each production wafer |
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Certified |
Optional. Each certified EM-Tec MCS standard is individually |
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Application |
SEM, FESEM, FIB, Auger, SIMS and reflected light microscopy |
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Identification |
Product ID with serial number etched |
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Mounting |
Unmounted, mounting optionally available |
Construction of the EM-Tec MCS-1 and MCS-0.1 calibration standard
EM-Tec MCS magnification calibration standards are manufactured using state of the art MEMS manufacturing techniques. For improved planarity, an ultra-flat Si substrate with deposited chromium and gold features is used. The features size ranges from 2.5mm down to 100nm on a single ultra-flat compact standard. High contrast 50nm thick chromium is used for the larger features down to 2.5µm. For the smaller features, from 1µm to 100nm, 50nm gold over a 20nm chromium base is used. This ensures excellent signal at all magnifications.
Feature sizes on the EM-Tec MCS-1TR and EM-Tec MCS-1CF are:
- 2500, 250 and 2.5µm
- 1000, 100, 10 and 1µm
- 500 and 5µm
Features sizes on the EM-Tec MCS-0.1TR and EM-Tec MCS-0.1CF are:
- 2500, 250, 2.5 and 0.25µm
- 1000, 100, 10, 1 and 0.1µm
- 500, 5 and 0.5µm
Each standard comes with a unique identification number consisting of a wafer ID and a position ID.
Traceability and certification
Traceable version: The traceable version of the EM-Tec MCS standard are produced by measuring randomly selected, 5 individual standards per wafer against a NIST measured standard. The average of measurements determines the level of uncertainty. By method of fabrication, the remaining standards on the same wafer are therefore traceable. Each standard comes with a wafer level certificate of traceability with the calibration results.
Certified version: The certified EM-Tec MCS magnification calibration standards are individually calibrated against a NIST measured standard. The uncertainty of the individually certified standards is better (lower) than the traceable standards. Each individually calibrated standard comes with a unique calibration certificate.
Using EM-Tec MCS standards
The EM-Tec MCS standard have been designed to cover four order of magnitude in magnification. The largest feature for the lowest magnification is 2.5mm. Bring the 2.5mm square in full view and by doubling the magnification the next feature is visible. With four steps the central features come in view - starting at 10µm and ending at 100nm. By choosing a suitable feature size the complete magnification range from 5x to 200,000x can be calibrated with the EM-Tec MCS-0.1. (5x to 20,000x for the EM-Tec MCS-10).
Cleaning
Try to use the same area for focusing and optimising the SEM before measurements. This will minimise contamination of other surface areas on the standard. When it becomes necessary to clean the EM-Tec MCS standard follow these guidelines:
- Remove dust and other lose particles with compressed dry filtered inert gas (nitrogen). As an alternative, a duster with compressed gas can be used - but be careful not to freeze the surface
- Rinse with distilled water followed by a rinse with isopropanol and let dry. Avoid liquids that leave a residue
- For hydrocarbon residues (contamination) and finger prints it is best to use a gentle oxygen plasma cleaner
- Do not use mechanical methods such as brushing, scrubbing or polishing
Certification end date
There is no end date on the certificates for the EM-Tec MCS. Due to the construction of Cr and Au on Si, the products are considered chemically stable under normal conditions of use. Since the standard is not mechanically touched, the only deterioration is contamination. We therefore expect the lifetime of this standard to be up to 10 years and beyond for clean systems. The re-certification period should be determined by the end-user depending use, storage, handling and the general condition of the standard. If subject to a catastrophic event which damages the standard, then it needs to be replaced.
A re-calibration service is not offered for this certified calibration standard because individual re-certification is substantially more expensive than a new certified standard. Recalibration or re-certification can only be performed by purchasing a new MCS standard.
TSB 31-T3100 EM-Tec MCS-1 and MCS-0.1 magnification calibration standard 2015-12-16 Revision 3
EM-Tec MCS-1TR traceable magnification calibration standard, 2.5mm to 1µm
The EM-Tec MCS-1 calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1 are: 2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm.
The 31-T31000 EM-Tec MCS-1TR is traceable on the wafer level against a NIST-measured calibration standard. Available unmounted or mounted on the most popular SEM stubs.
Example of wafer level certificate of traceability for the EM-Tec MCS-1TR magnification calibration standard, 2.5mm to 1µm.
We also offer a individually certified version.
please click here for magnified image
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 EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1µm, mounted on standard 12.7mm pin (each) |
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EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1um, mounted on standard 12.7mm pin (each) |
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EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1µm, mounted on custom stub (each) |
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EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1µm, mounted on Zeiss 12.7mm pin stub (each) |
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EM-Tec MCS-1TR traceable calibration standard- 2.5mm to 1um- mounted on Zeiss 12.7mm pin stub (each) |
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EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1µm, mounted on 12.2mm JEOL stub (each) |
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EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1µm, mounted on 15mm Hitachi stub (each) |
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EM-Tec MCS-1TR traceable calibration standard- 2.5mm to 1um- mounted on 15mm Hitachi stub (each) |
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EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1µm, unmounted (each) |
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EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1um, unmounted (each) |
EM-Tec MCS-1TR certified magnification calibration standard, 2.5mm to 1µm
The EM-Tec MCS-1 calibration standard has been developed to accurately calibrate table top SEMs, reflected light microscopes, compact SEMs and low-to-medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1 are: 2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm.
The 31-C31000 EM-Tec MCS-1CF is individually certified utilising a NIST-measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs. Example of individual certificate of calibration for the EM-Tec MCS-1CF certified magnification calibration standard, 2.5mm to 1µm.
please click here for magnified image
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EM-Tec MCS-1CF certified calibration standard, 2.5mm to 1µm, mounted on standard 12.7mm pin (each) |
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EM-Tec MCS-1CF certified calibration standard- 2.5mm to 1um- mounted on standard 12.7mm pin (each) |
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EM-Tec MCS-1CF certified calibration standard, 2.5mm to 1µm, mounted on custom stub (each) |
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EM-Tec MCS-1CF certified calibration standard, 2.5mm to 1µm, mounted on Zeiss 12.7mm pin stub (each) |
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.EM-Tec MCS-1CF certified calibration standard- 2.5mm to 1um- mounted on Zeiss 12.7mm pin stub (each) |
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EM-Tec MCS-1CF certified calibration standard, 2.5mm to 1µm, mounted on 12.2mm JEOL stub (each) |
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EM-Tec MCS-1CF certified calibration standard, 2.5mm to 1µm, mounted on 15mm Hitachi stub (each) |
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EM-Tec MCS-1CF certified calibration standard- 2.5mm to 1um- mounted on 15mm Hitachi stub (each) |
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EM-Tec MCS-1CF certified calibration standard, 2.5mm to 1µm, unmounted (each) |
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EM-Tec MCS-1CF certified calibration standard- 2.5mm to 1um- unmounted (each) |
EM-Tec MCS-0.1TR traceable magnification calibration standard, 2.5mm to 100nm
The EM-Tec MCS-0.1 calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The 31-T32000 EM-Tec MCS-0.1TR is NIST-traceable on the wafer level against a NIST-calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. This is a good alternative to the discontinued SIRA calibration standard. Example of wafer level certificate of traceability for the EM-Tec MCS-0.1TR magnification calibration standard, 2.5mm to 100nm.
please click here for magnified image
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 EM-Tec MCS-0.1TR traceable calibration standard, 2.5mm to 100nm, mounted on standard 12.7mm pin (each) |
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.EM-Tec MCS-0.1TR traceable calibration standard, 2.5mm to 100nm, mounted on standard 12.7mm pin (each) |
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EM-Tec MCS-0.1TR traceable calibration standard, 2.5mm to 100nm, mounted on custom stub (each) |
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EM-Tec MCS-0.1TR traceable calibration standard, 2.5mm to 100nm, mounted on Zeiss 12.7mm pin stub (each) |
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EM-Tec MCS-0.1TR traceable calibration standard- 2.5mm to 100nm- mounted on Zeiss 12.7mm pin stub (each) |
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EM-Tec MCS-0.1TR traceable calibration standard, 2.5mm to 100nm, mounted on 12.2mm JEOL stub (each) |
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EM-Tec MCS-0.1TR traceable calibration standard, 2.5mm to 100nm, mounted on 15mm Hitachi stub (each) |
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EM-Tec MCS-0.1TR traceable calibration standard- 2.5mm to 100nm- mounted on 15mm Hitachi stub (each) |
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EM-Tec MCS-0.1TR traceable calibration standard, 2.5mm to 100nm, unmounted (each) |
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.M-Tec MCS-0.1TR traceable calibration standard, 2.5mm to 100nm, unmounted (each) |
EM-Tec MCS-0.1TR certified magnification calibration standard, 2.5mm to 100nm
The EM-Tec MCS-0.1 calibration standard has been developed to most accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The 31-C32000 EM-Tec MCS-0.1CF is individually NIST-certified utilising a NIST-calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. An excellent alternative to the discontinued SIRA calibration standard, but with easier to use compatible feature sizes. Example of individual certificate of calibration for the EM-Tec MCS-0.1CF certified magnification calibration standard, 2.5mm to 100nm
Am excellent alternative to the discontinued SIRA calibration standard with easier to use compatible feature sizes: see TSB 31-C32000 EM-Tec MCS-0.1CF replacement for SIRA calibration standard.
please click here for magnified image
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EM-Tec MCS-0.1CF certified calibration standard, 2.5mm to 100nm, mounted on standard 12.7mm pin (each) |
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EM-Tec MCS-0.1CF certified calibration standard- 2.5mm to 100nm- mounted on standard 12.7mm pin (each) |
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EM-Tec MCS-0.1CF certified calibration standard, 2.5mm to 100nm, mounted on custom stub (each) |
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EM-Tec MCS-0.1CF certified calibration standard, 2.5mm to 100nm, mounted on Zeiss 12.7mm pin stub (each) |
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EM-Tec MCS-0.1CF certified calibration standard, 2.5mm to 100nm, mounted on Zeiss 12.7mm pin stub (each) |
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EM-Tec MCS-0.1CF certified calibration standard, 2.5mm to 100nm, mounted on 12.2mm JEOL stub (each) |
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EM-Tec MCS-0.1CF certified calibration standard, 2.5mm to 100nm, mounted on 15mm Hitachi stub (each) |
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EM-Tec MCS-0.1CF certified calibration standard- 2.5mm to 100nm- mounted on 15mm Hitachi stub (each) |
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EM-Tec MCS-0.1CF certified calibration standard, 2.5mm to 100nm, unmounted (each) |
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.EM-Tec MCS-0.1CF certified calibration standard, 2.5mm to 100nm, unmounted (each) |