Special offer - Delivery now £4.99 when ordered onlineMultiple target graticule calibration standards
Micro-Tec MTC-5 multiple target graticule calibration standards have been designed by Micro to Nano using an ultra-flat conductive silicon substrate with corrosion resistant Chromium lines. These new and innovative standards have precise patterns that are manufactured using the latest semiconductor manufacturing techniques. The Micro-Tec multi target graticules provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging, optical quality control systems and low magnification SEM imaging for:
- Magnification calibration
- Critical dimension measurements
- Distortion correction
- Imaging quality assessment
- Quality control measurements
There are four distinct patterns on the MTC-5 calibration standard:
- Circle patterns from 10µm to 5mm in diameter
- Square patterns from 10 x 10µm to 5 x 5mm
- Hexagon patterns from 10µm to 5mm across
- Cross-scale pattern of 5 x 5mm with 0.01mm divisions
The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.
Each of the calibration standards has a unique product ID serial number etched on the die. Micro-Tec MTC-5 calibration standards are NIST traceable and a wafer level certificate of traceability is supplied with each standard. The MTC-5 is available in two versions:
- MTC-5 with Cr lines on silicon for bright field imaging
- MTCD-5 with inverted pattern (area between line coated with Cr) for dark field imaging
Specifications
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Substrate |
525µm thick boron doped ultra-flat wafer with <100> orientation |
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Conductive |
Excellent; 5-10 Ohm resistivity |
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Patterns |
Circles, squares, hexagons, cross scale |
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Pattern size |
5 x 5mm (4x) |
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Lines |
75nm thick, pure bright chromium lines |
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Cross scale |
5mm wide lines, 5 x 5mm with 0.01mm divisions |
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Die size |
12 x 12mm |
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Application |
Reflective light, scanning electron microscopy, optical imaging systems |
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Identification |
Product ID with serial number etched |
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Mounting |
Unmounted, mounting optionally available |
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Supplied |
Supplied in a Gel-Pak box |
Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns - bright field
The Micro-Tec MTC-5 bright field multiple target calibration standard comprises accurately deposited bright chromium lines on a conductive ultra-flat silicon substrate. The MTC-5 has been designed for calibrating reflective light microscopes, stereo microscopes, optical quality control systems and for low magnification SEM imaging. The Micro-Tec MTC-5 incorporates four distinct patterns: circle patterns from 10µm to 5mm diameter, square patterns from 10 x 10µm to 5 x 5mm, hexagon patterns from 10µm to 5mm across and cross-scale patterns of 5 x 5mm with 0.01mm divisions.
The four chromium deposited patterns are all in the same focus plane and provide a superior signal compared to etched patterns. The Micro-Tec MTC-5 is a NIST-traceable standard. Example of wafer level certificate of traceability for the Micro-Tec MTC-5 multiple target calibration standard.
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 Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted on custom specimen stub (each) |
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Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted on black microscope slide (each) |
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Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted on 25.4mm pin stub (each) |
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Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted op 25mm JEOL stub (each) |
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Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted on 25mm Hitachi stub (each) |
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Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, unmounted (each) |
Micro-Tec MTCD-5 multiple target calibration standard with 4 patterns - dark field
MTCD-5 dark field multiple target calibration standard is made up of four inverted patterns: chromium deposited area with features left undeposited showing the silicon substrate. Designed for dark field applications in reflected light microscopy, optical quality control systems and for low magnification SEM imaging. The large chromium coated area can also be used to assess the ability of optical systems to distinguish features in high brightness and high reflection applications.
Patterns are: Inverted circle patterns from 10µm to 5mm diameter, inverted square patterns from 10 x 10µm to 5 x 5mm, inverted hexagon patterns from 10µm to 5mm across and inverted cross scale patterns of 5 x 5mm with 0.01mm divisions. The four chromium deposited patterns are all in the same focus plane and provide a superior signal compared to etched patterns.
The Micro-Tec MTCD-5 is a NIST traceable standard.
An example of a wafer level certificate of traceability for the Micro-Tec MTCD-5 multiple target calibration standard (right)
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 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on custom specimen stub (each) |
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Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on black microscope slide (each) |
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Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on 25.4mm pin stub (each) |
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Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted op 25mm JEOL stub (each) |
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Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on 25mm Hitachi stub (each) |
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Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, unmounted (each) |