PIE Scientific - technology-leading RF plasma etching/ashing/cleaning systems
Labtech is pleased to partner US-based Plasma Ion Electron Scientific (PIE Scientific) in the UK and Ireland. The company was founded by alumni of the Plasma & Ion Source Group of the prestigious Lawrence Berkeley National Laboratory – working alongside experienced engineers from the semiconductor and electron microscope manufacturing industries.
At the heart of the PIE Scientific range are innovative, technology-leading plasma cleaning systems. There are two product groups:
KLEEN series: compact, smart chamber-mounted downstream RF plasma cleaners
Tergeo series: bench top RF plasma systems
To learn more about the principles behind RF plasma cleaning for SEM, TEM and FIB specimens, holders and chambers see: EM cleaning.