Quartz crystals for film thickness monitors/controllers

EM-Tec quartz crystals are particularly suited for thickness monitors (FTM), thickness controllers and quartz crystal microbalances (QCM) used with a range of vacuum instrumentation, including SEM sputter coaters and EM carbon evaporation systems. EM-Tec quartz crystals are plano-convex, 14.0mm (0.55”) in diameter and are compatible with all thickness measurement, controller and QCM systems using 5MHz and 6MHz sensors. These are used on sputter coaters, carbon coaters and vacuum deposition systems from: Cressington/Agar, Bal-Tec, Denton, Emitech, Edwards, JEOL, Leica, Polaron/Bio-rad/Fisons/Thermo VG/Quorum and Safematic. Crystals are packaged in a flat pack carousel which contains ten QCM crystals.

EM-Tec quartz crystals are available with two types of coating for the electrodes:

Gold electrodes are standard and recommended for low film stress deposition materials such as gold, silver, palladium, gold/palladium, platinum/palladium and copper
Silver electrodes are recommended for high film stress deposition materials such as chromium, nickel, platinum, iridium and carbon

Part #	64-010855	64-010857	64-010851	64-010853
Frequency	6 MHz		5 Mhz
Shape	Plano-convex		Plano-convex
Substrate material	Quartz		Quartz
Electrode	Gold	Silver	Gold	Silver
Diameter	14mm / 0.55”		12.5mm / 0.49”
Thickness	0.27mm		0.27mm
Packaging / pack size	Carousel/10		Carousel/10
Application	Low stress films	High stress films	Low stress films	High stress films