Safematic CCU-010 HV high vacuum carbon coater
Safematic CCU-010 HV sets new standards for fully automated carbon coating with an impressive high vacuum performance which ensures high quality coating for SEM and TEM applications. A self-contained plug-in-style carbon fibre cord evaporation head module delivers unsurpassed ease of use and servicing.
CCU-010HV carbon coater
- Fully automatic carbon coating for SEM and TEM
- Pulsed evaporation in standard and gentle modes for finer coating
- Self-contained, plug-in style coating modules - easy upgrade to high resolution sputtering
- Integral, oil-free, high vacuum turbomolecular pumping
- Multiple carbon evaporation coating runs before source change
- Dual-location quartz crystal film thickness measurement - fitted as standard
- Intuitive, touch-screen control - rapid data input, simple operation
CT-010 carbon coating module
A highlight of the Safematic carbon coating module (CT-010) is the novel carbon fibre evaporation system - featuring a proprietary (patented) automatic carbon fibre spooling system. This allows up to 50 carbon coating runs without the need to change the carbon fibre source – a huge advantage over labour intensive “single shot” carbon coating systems. The CT-010 also features evaporation modes to suit requirements: gentle pulsed evaporation for thin films and/or temperature sensitive samples, whilst short-time coating mode with high power is useful for where thick layers are required (e.g. some FIB applications).
Precise control of carbon coating thickness
The CT-010 carbon module can precisely control carbon film thickness and terminate evaporation at user-defined thickness. The process uses the on-board quartz film thickness measurement system in combination with pulsed evaporation to track the increase in carbon film thickness and then adjust the evaporation current as it nears the user-defined thickness, typically in the region of 3-15nm for EM applications.
To find out more please see: precise carbon thickness control.
Click here for detailed information: CT-010 carbon coating module
Dual-location film thickness monitor (FTM)
A dual-position film thickness monitor (FTM) measurement system monitors and terminates the coating process at a user-defined thickness. The plug-in monitoring quartz crystal and holder can be moved between the centre of the specimen stage and the outside, to accommodate different specimen sizes.
Oil-free,high vacuum pumping
CCU-010 HV has a fully integrated Pfeiffer Hi Pace 80 turbomolecular backed by a compact Vacuubrand MD1 Vario-SP membrane pump. With both contained in the main console, this oil-free pumping system delivers class-leading vacuum performance (to 1 x 10-6mbar) all in a compact instrument with a footprint of only 35 x 55cm.
Rotating and rotary planetary specimen stages
CCU-010 HV includes a standard plug-in style 80mm diameter specimen stage with adjustable height and tilt angle. For specimens requiring rotation the optional RS-010 rotation stage is available. For specimens with very irregular surfaces, or for particulates and spheres, the PS-006 rotary planetary stage is recommended.
ET-010 plasma cleaning accessory
The ET-010 plasma cleaning accessory is a fully integrated option for the Safematic CCU-010 sputter/carbon coater that is designed for the pre-treatment or post-treatment of specimens in combination with a coating process. SEM specimens can be pre-cleaned to remove light surface contamination prior to coating, without the need to breaking vacuum between cleaning and sputtering processes. Additionally,TEM carbon films can be converted from hydrophobic to hydrophilic using an air plasma.
Click here for detailed information: ET-010 plasma cleaning accessory
Coating LAB option - getting the most from your coating data
Offers easy access to coating and process data. The Windows-based software allows access to all the key data - pressure, current, voltage, coating rate, coating thickness and specimen temperature - as real-time curves. The coater is connected to a PC using an integrated USB interface, whilst the Coating LAB automatically establishes a connection to the coater. Password protected tools for configuring the system and updating the firmware are included. For more details see: Coating LAB.
HS-010 vacuum storage system
The HS-010 is a compact vacuum storage system that allows a second CCU-010 coating head, additional stage and a range of sputtering targets to be stored under vacuum when not in use.
For further information please see: HS-010 vacuum storage system
Learn more about Safematic's unique carbon coating and sputtering modules...
Selecting a coater
Need help selecting a coater, options and sputtering targets to suit your requirements? Then please see: coater selection guide.
CCU-010 HV specification
Dimensions (unpacked): L 570 x W 360 x H 350mm. 25kg
Glass cylinder: Ø 120mm (DN 100 ISO-KF compatible)
Implosion guard: Plastic splinter shield around the glass cylinder
Targets: Ø 54mm and thickness up to 3mm
Coating time: 0.5 to 990s
Coating current 10-100mA
Pumping: Integrated, oil-free turbomolecular and membrane pumps
Ultimate vacuum: <2 x 10-6 mbar
Vacuum measurement: Pirani and cold cathode gauges
Display: 115 x 86mm, TFT graphical display
Specimen stage: Ø 80mm, height adjustment 0-50mm, tilt 0-45°
Film thickness measurement: Dual-position film thickness monitoring system. Piezoelectric crystal: frequency 6MHz, Ø 14mm, thickness 0.4mm.
Electrical: Plug C14, 90-260VAC, 47-63 Hz, 500W
Process gas connections: Process gas: Ø 6mm, venting gas: Ø 6mm, plasma gas: Ø 6mm
Electrical: Connector socket C13, secured with 10A therm. circuit breaker
Put us to the test
Base unit and coating module
CCU-010 optional accessories and consumables
Consisting of: base plate for connection to the tilt and height adjustable specimen table of the CCU-010 basic unit. Sample holders for six large (Ø 25.4mm) or six small (Ø12.7mm) SEM pin stubs. DC-micro motor for rotation and planetary movement, quartz sensor (centre), speed control: 0-100%, rotation: 0-20rpm approximately, planets: 0-65rpm approximately
Glow discharge and plasma cleaning
CCU-010 Coating LAB
CCU-010 head module storage
Replacement carbon fibre