Safematic CCU-010 HV high vacuum carbon coater
Safematic CCU-010 HV sets new standards for fully automated carbon coating with an impressive high vacuum performance which ensures high quality coating for SEM and TEM applications. A self-contained plug-in-style carbon fibre cord evaporation head module delivers unsurpassed ease of use and servicing.
CCU-010HV carbon coater
- Fully automatic high vacuum TEM carbon coater, SEM carbon coater or both
- Pulsed carbon evaporation in standard and gentle modes for finer coating
- Self-contained, plug-in style coating modules - easy upgrade to high resolution sputter coating
- Integral, oil-free, high vacuum turbomolecular pumping
- Multiple carbon evaporation coating runs before source change
- Dual-location quartz crystal film thickness measurement - fitted as standard
- Intuitive, touch-screen control - rapid data input, simple operation
- Large chamber for samples up to 6"/152mm diameter
CT-010 carbon coating module
A highlight of the Safematic carbon coating module (CT-010) is the novel carbon fibre evaporation system - featuring a proprietary (patented) automatic carbon fibre spooling system. This allows up to 50 carbon coating runs without the need to change the carbon fibre source – a huge advantage over labour intensive “single shot” carbon coaters. The CT-010 also features carbon coating modes to suit requirements: gentle pulsed carbon coating for thin films and/or temperature sensitive samples, whilst short-time carbon coating mode with high power is useful for where thick layers are required (e.g. some FIB applications).
Precise control of carbon coating thickness
The CT-010 carbon coater module can precisely control carbon film thickness and terminate evaporation at user-defined thickness. The process uses the on-board quartz film thickness measurement system in combination with pulsed evaporation to track the increase in carbon film thickness and then adjust the evaporation current as it nears the user-defined thickness, typically in the region of 3-15nm for EM applications.
To find out more please see: Precise carbon thickness control.
Click here for detailed information: CT-010 carbon coating module
Dual location film thickness monitor - included as standard
A dual-position film thickness monitor (FTM) measurement system monitors and terminates the coating process at a user-defined thickness. The plug-in monitoring quartz crystal and holder can be moved between the centre of the specimen stage and the outside, to accommodate different specimen sizes.
Oil-free, high vacuum pumping
CCU-010 HV has a fully integrated Pfeiffer Hi Pace 80 turbomolecular backed by a compact Vacuubrand MD1 Vario-SP membrane pump. With both contained in the main console, this oil-free pumping system delivers class-leading vacuum performance (to 1 x 10-6mbar) all in a compact instrument with a footprint of only 35 x 55cm.
Rotation and rotary planetary stages
CCU-010 HV includes a standard plug-in style 80mm diameter specimen stage with adjustable height and tilt angle. For specimens requiring rotation the optional RS-010 rotation stage is available. For specimens with very irregular surfaces, or for particulates and spheres, the PS-006 rotary planetary stage is recommended.
ET-010 plasma cleaning accessory
The ET-010 plasma cleaning accessory is a fully integrated option for the Safematic CCU-010 sputter/carbon coater that is designed for the pre-treatment or post-treatment of specimens in combination with a coating process. SEM specimens can be pre-cleaned to remove light surface contamination prior to sputter coating or carbon coating, without the need to breaking vacuum between cleaning and sputtering and carbon evaporation processes. Additionally,TEM carbon films can be converted from hydrophobic to hydrophilic using an air plasma.
Click here for detailed information: ET-010 plasma cleaning accessory
Coating LAB option - getting the most from your coating data
Offers easy access to coating and process data. The Windows-based software allows access to all the key data - pressure, current, voltage, carbon coating and sputter coating rate, coating thickness and specimen temperature - as real-time curves. The coater is connected to a PC using an integrated USB interface, whilst Coating LAB automatically establishes a connection to the coater. Password protected tools for configuring the system and updating the firmware are included. For more details see: Coating LAB.
RC-010 remote control software - full control of the CCU-010 from a glove box
RC-010 is Windows-based RC remote control software which allows the CCU-010 to be remotely controlled and monitored, for example from a glovebox. The graphical user interface allows easy set up and selection of sputtering and carbon coating recipes and comes ready with pre-defined recipes with optimal settings for the most common metal sputtering targets as well as carbon. Connection from a laptop or computer to the CCU-010 coating system is via a USB cable.
Minimum system requirements:
Windows 10, Windows 8.1, Windows 8, Windows 7 SP1, Windows Vista SP2, Pentium 366 MHz or higher, minimum 512MB of RAM, screen resolution 1024x768 or higher, USB 2.0 Interface
Brochure download: RC-010 .
HS-010 vacuum storage system
The HS-010 is a compact vacuum storage system that allows a second CCU-010 coating head, additional stage and sputter coater targets to be stored under vacuum when not in use.
For further information please see: HS-010 vacuum storage system
Large chamber option for samples up to 6" (152mm) in diameter
The LC-006 is a large chamber option that replaces the standard glass chamber and allows specimens up to 6” (152mm) to be coated. The chamber is made of aluminium therefore does not require an implosion guard.
A sample holder for 6” wafers is included, other holders can be fitted.
The LC-006 can be retrofitted to existing CCU-010 coaters.
Learn more about Safematic's unique carbon coating and sputtering modules:
CT-010 carbon evaporation module
Selecting a coater
Need help selecting a coater, options and sputtering targets to suit your requirements? Then please see: coater selection guide.
CCU-010 HV specification
Dimensions (unpacked): L 570 x W 360 x H 350mm. 25kg
Glass cylinder: Ø 120mm (DN 100 ISO-KF compatible)
Implosion guard: Plastic splinter shield around the glass cylinder
Targets: Ø 54mm and thickness up to 3mm
Coating time: 0.5 to 990s
Coating current 10-100mA
Pumping: Integrated, oil-free turbomolecular and membrane pumps
Ultimate vacuum: <2 x 10-6 mbar
Vacuum measurement: Pirani and cold cathode gauges
Display: 115 x 86mm, TFT graphical display
Specimen stage: Ø 80mm, height adjustment 0-50mm, tilt 0-45°
Film thickness measurement: Dual-position film thickness monitoring system. Piezoelectric crystal: frequency 6MHz, Ø 14mm, thickness 0.4mm.
Electrical: Plug C14, 90-260VAC, 47-63 Hz, 500W
Process gas connections: Process gas: Ø 6mm, venting gas: Ø 6mm, plasma gas: Ø 6mm
Electrical: Connector socket C13, secured with 10A therm. circuit breaker
Put us to the test
Base unit and coating module
Large chamber option for samples up to 6" (152mm) in diameter
CCU-010 optional accessories and consumables
Consisting of: base plate for connection to the tilt and height adjustable specimen table of the CCU-010 basic unit. Sample holders for six large (Ø 25.4mm) or six small (Ø12.7mm) SEM pin stubs. DC-micro motor for rotation and planetary movement, quartz sensor (centre), speed control: 0-100%, rotation: 0-20rpm approximately, planets: 0-65rpm approximately
Glow discharge and plasma cleaning
CCU-010 Remote controll software and Coating LAB
Windows-based RC-010 remote control software allows Safematic CCU-010 coaters to be run remotely for the control, monitor and analyse of coating processes, for example, in a glove box. The graphical user interface facilitates the easy set up and selection of recipes. The RC-010 tool also comes ready with pre-defined recipes with optimal settings for the most common metal sputtering targets as well as carbon.
CCU-010 head module storage
Replacement carbon fibre
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