Safematic CCU-010 LV standard vacuum carbon coater
The Safematic CCU-010 LV is a standard vacuum (rotary or dry scroll pumped) carbon coater, primarily designed for coating SEM specimens for EDS and WDS. For high resolution SEM and TEM carbon applications the high vacuum CCU-010 HV is recommended.
A unique feature of the CCU-010 is the compact, self-contained, carbon evaporation head module which ensures optimum ease of use and servicing. A stand-out highlight of the carbon coating module is its evaporation capabilities - featuring a multi-coating, automatic carbon fibre spooling system.
The glass vacuum chamber is 120mm in diameter and includes a handy vertical graduated scale to help set the height of the specimen stage. An implosion guard with safety monitoring is also fitted.
CCU-010 LV carbon coater highlights
- Fully automatic carbon coating for SEM
- Self-contained carbon coating module
- Up to 50 carbon evaporation runs before source change
- Simple plug-in upgrade to sputter coating
- Quartz film thickness measurement as standard
- Intuitive, touch screen control - rapid data input, simple operation
- Large chamber option for coating specimens up to 6"/152mm
- Easy upgrade path to high vacuum coating

Carbon coating module: gentle pulse mode and unique carbon fibre spooling
A highlight of the carbon coating module (CT-010) is the novel carbon fibre evaporation system - featuring patented automatic carbon fibre spooling. This allows up to 50 coating runs without the need to change the carbon source - a huge advantage over labour intensive “single shot” carbon coating systems. For detailed information please see: CT-010 carbon coating module.
The CT-010 also features evaporation modes to suit requirements: gentle pulsed evaporation for thin films and/or temperature sensitive samples, whilst short-time coating mode with high power is useful for where thick layers are required (e.g. some FIB applications).
Glow discharge
The primary EM application of the glow discharge option (100004) is for the post-treatment of TEM carbon films. For this application the high vacuum CCU-010 HV is recommend. Conveniently the glow discharge attachment clips directly onto the carbon evaporation module. This allows sequential carbon coating and glow discharge treatment without the inconvenience and time delay of having to “break” vacuum and exchange process heads.
For details of carbon fibre cord please see: carbon fibre cord.

Dual-position film thickness monitor as standard
The CCU-010 LV comes with a dual-position film thickness monitor (FTM) measurement system. The plug-in monitoring crystal can be moved between the centre of the stage and the outside, depending on specimen size.
Vacuum pumping requirements
The CCU-010 LV requires a "backing" rotary vacuum pump. With high performance, reliability and low noise characteristics, an Edwards RV is ideally suited for this purpose. please see ordering information (below) for details.

Specimen stages
The CCU-010 LV includes a static, but height and tilt angle adjustable, plug-in style 80mm diameter specimen stage. For specimens requiring rotation the optional RS-010 rotary stage is recommended. For specimens with very irregular surfaces, particulates and spheres, the PS-006 rotary planetary stage is available.
ET-010 plasma cleaning accessory
The ET-010 plasma cleaning accessory is a fully integrated option for the Safematic CCU-010 sputter/carbon coater that is designed for the pre-treatment or post-treatment of specimens in combination with a coating process. SEM specimens can be pre-cleaned to remove light surface contamination prior to coating, without the need to breaking vacuum between cleaning and sputtering processes. Additionally,TEM carbon films can be converted from hydrophobic to hydrophilic using an air plasma.
Click here for detailed information: ET-010 plasma cleaning accessory
RC-010 remote control software - full control of the CCU-010 from a glove box
RC-010 is Windows-based RC remote control software which allows the CCU-010 to be remotely controlled and monitored, for example from a glovebox. The graphical user interface allows easy set up and selection of recipes and comes ready with pre-defined recipes with optimal settings for the most common metal sputtering targets as well as carbon. Connection from a laptop or computer to the CCU-010 coating system is via a USB cable.
Minimum system requirements:
Windows 10, Windows 8.1, Windows 8, Windows 7 SP1, Windows Vista SP2, Pentium 366 MHz or higher, minimum 512MB of RAM, screen resolution 1024x768 or higher, USB 2.0 Interface
Brochure download: RC-010 .
Large chamber option for samples up to 6" (152mm) in diameter
The LC-006 is a large chamber option that replaces the standard glass chamber and allows specimens up to 6” (152mm) to be coated. The chamber is made of aluminium therefore does not require an implosion guard.
A sample holder for 6” wafers is included, other holders can be fitted.
The LC-006 can be retrofitted to existing CCU-010 coaters.
Coating LAB option
Offers easy access to coating and process data. The Windows software allows access to important data including pressure, current, voltage, coating rate, coating thickness and specimen temperature as real-time curves. The coater is connected to a PC using an integrated USB interface, whilst the Coating LAB automatically establishes a connection to the coater. Password protected tools for configuring the system and updating the firmware are included. For further information see: Coating LAB.
HS-010 head module vacuum storage box
The HS-010 is a compact vacuum storage box which allows a second CCU-010 coating head for the CCU-010 module, additional planetary or rotary stage and the full range of sputtering targets and carbon thread clean and under vacuum when not in use.
For further information please see: HS-010 vacuum storage box.
High vacuum and sputtering upgrades - future proving your investment
If in the future you wish to upgrade the CCU-010 LV to high vacuum CCU-010 HV specification, then this is possible using one of two upgrade kits.
The SP-010 sputtering module conveniently includes all the features required for high quality sputter coating - including magnetron, target, shutter, process pressure regulator, power electronics and cooling system - all in a compact modules that is interchangeable with the carbon coating module.
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Ordering information
CCU-010 base unit and carbon evaporation module
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Large chamber option for samples up to 6" (152mm) in diameter
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Glow discharge and etch accessories
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Specimen stages
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Consisting of: base plate for connection to the tilt and height adjustable specimen table of the CCU-010 basic unit. Sample holders for six large (Ø 25.4mm) or six small (Ø12.7mm) SEM pin stubs. DC-micro motor for rotation and planetary movement, quartz sensor (centre), speed control: 0-100%, rotation: 0-20rpm approximately, planets: 0-65rpm approximately |
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CCU-010 Remote control software, Coating LAB and vacuum storage
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Windows-based RC-010 remote control software allows Safematic CCU-010 coaters to be run remotely for the control, monitor and analyse of coating processes, for example, in a glove box. The graphical user interface facilitates the easy set up and selection of recipes. The RC-010 tool also comes ready with pre-defined recipes with optimal settings for the most common metal sputtering targets as well as carbon. |
Pumping options
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The Edwards EMF10 filter captures oil mist from the outlet of pumps, which would otherwise be ejected into the atmosphere. The EMF10 mist filter is suitable for use with Edward RV3, RV5 and RV8 vacuum pumps. They are very efficient at 99.999% DOP test and are also azide proof. Supplied with a NW25 clamp, centering ring and ‘O’ ring, NW25 to 3/4 inch BSP adaptor. |
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Carbon fibre
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