Safematic CCU-010 LV standard vacuum carbon coater
The Safematic CCU-010 LV is a standard vacuum (rotary or dry scroll pumped) carbon coater, primarily designed for coating SEM specimens for EDS and WDS. For high resolution SEM and TEM carbon applications the high vacuum CCU-010 HV is recommended.
A unique feature of the CCU-010 is the compact, self-contained, carbon evaporation head module which ensures optimum ease of use and servicing. A stand-out highlight of the carbon coating module is its evaporation capabilities - featuring a multi-coating, automatic carbon fibre spooling system.
The glass vacuum chamber is 120mm in diameter and includes a handy vertical graduated scale to help set the height of the specimen stage. An implosion guard with safety monitoring is also fitted.
CCU-010 LV carbon coater highlights
- Fully automatic carbon coating for SEM
- Self-contained carbon coating module
- Up to 50 carbon evaporation runs before source change
- Simple plug-in upgrade to sputter coating
- Quartz film thickness measurement as standard
- Intuitive, touch screen control - rapid data input, simple operation
- Easy upgrade path to high vacuum coating
Carbon coating module: gentle pulse mode and unique carbon fibre spooling
A highlight of the carbon coating module (CT-010) is the novel carbon fibre evaporation system - featuring patented automatic carbon fibre spooling. This allows up to 50 coating runs without the need to change the carbon source - a huge advantage over labour intensive “single shot” carbon coating systems. For detailed information please see: CT-010 carbon coating module.
The CT-010 also features evaporation modes to suit requirements: gentle pulsed evaporation for thin films and/or temperature sensitive samples, whilst short-time coating mode with high power is useful for where thick layers are required (e.g. some FIB applications).
The primary EM application of the glow discharge option (100004) is for the post-treatment of TEM carbon films. For this application the high vacuum CCU-010 HV is recommend. Conveniently the glow discharge attachment clips directly onto the carbon evaporation module. This allows sequential carbon coating and glow discharge treatment without the inconvenience and time delay of having to “break” vacuum and exchange process heads.
For details of carbon fibre cord please see: carbon fibre cord.
Dual-position film thickness monitor as standard
The CCU-010 LV comes with a dual-position film thickness monitor (FTM) measurement system. The plug-in monitoring crystal can be moved between the centre of the stage and the outside, depending on specimen size.
Vacuum pumping requirements
The CCU-010 LV requires a "backing" rotary vacuum pump. With high performance, reliability and low noise characteristics, the Pfeiffer Pascal 2005 SD is ideally suited for this purpose. For further information see: Pfeiffer Pascal 2005 SD.
The CCU-010 LV includes a static, but height and tilt angle adjustable, plug-in style 80mm diameter specimen stage. For specimens requiring rotation the optional RS-010 rotary stage is recommended. For specimens with very irregular surfaces, particulates and spheres, the PS-006 rotary planetary stage is available.
ET-010 plasma cleaning accessory
The ET-010 plasma cleaning accessory is a fully integrated option for the Safematic CCU-010 sputter/carbon coater that is designed for the pre-treatment or post-treatment of specimens in combination with a coating process. SEM specimens can be pre-cleaned to remove light surface contamination prior to coating, without the need to breaking vacuum between cleaning and sputtering processes. Additionally,TEM carbon films can be converted from hydrophobic to hydrophilic using an air plasma.
Click here for detailed information: ET-010 plasma cleaning accessory
Coating LAB option
Offers easy access to coating and process data. The Windows software allows access to important data including pressure, current, voltage, coating rate, coating thickness and specimen temperature as real-time curves. The coater is connected to a PC using an integrated USB interface, whilst the Coating LAB automatically establishes a connection to the coater. Password protected tools for configuring the system and updating the firmware are included. For further information see: Coating LAB.
HS-010 head module vacuum storage box
The HS-010 is a compact vacuum storage box which allows a second CCU-010 coating head for the CCU-010 module, additional planetary or rotary stage and the full range of sputtering targets and carbon thread clean and under vacuum when not in use.
For further information please see: HS-010 vacuum storage box.
High vacuum and sputtering upgrades - future proving your investment
If in the future you wish to upgrade the CCU-010 LV to high vacuum CCU-010 HV specification, then this is possible using one of two upgrade kits.
The SP-010 sputtering module conveniently includes all the features required for high quality sputter coating - including magnetron, target, shutter, process pressure regulator, power electronics and cooling system - all in a compact modules that is interchangeable with the carbon coating module.
Put us to the test
CCU-010 base unit and carbon evaporation module
Glow discharge and etch accessories
Consisting of: base plate for connection to the tilt and height adjustable specimen table of the CCU-010 basic unit. Sample holders for six large (Ø 25.4mm) or six small (Ø12.7mm) SEM pin stubs. DC-micro motor for rotation and planetary movement, quartz sensor (centre), speed control: 0-100%, rotation: 0-20rpm approximately, planets: 0-65rpm approximately
CCU-010 Coating LAB and vacuum storage
The Edwards EMF10 filter captures oil mist from the outlet of pumps, which would otherwise be ejected into the atmosphere. The EMF10 mist filter is suitable for use with Edward RV3, RV5 and RV8 vacuum pumps. They are very efficient at 99.999% DOP test and are also azide proof. Supplied with a NW25 clamp, centering ring and ‘O’ ring, NW25 to 3/4 inch BSP adaptor.
CCU-010 LV ordering information
|100001||CCU-010 LV. Compact coating system base unit. Low vacuum. External rotary pump (200002) or scroll pump required|
|Rotary vacuum pump|
|200002||Pfeiffer Pascal 2005 SD 5 m3/hr rotary pump with oil mist filter|
|TBA||Dry scroll pump 10 m3/hr (oil-free)|
|Options for coating and glow discharge|
|100002||SP-010. Sputtering head module|
|100012||SP-011. Sputtering head module for high sputtering rates|
|100003||CT-010. Carbon fibre cord evaporation head module, featuring a carbon spooling system for up to 50 depositions|
|100004||Glow discharge for hydrophobic/hydrophilic treatment of carbon films|
|Specimen stage options. The CCU-010 LV is fitted as standard with static specimen stage, with adjustment for height and tilt but no rotation|
|100005||RS-010 rotation stage (variable rotation speed)|
|100006||PS-010 rotary planetary stage (varible rotation speed)|
|400020||Additional 80mm Ø standard specimen platform|
|100008||Coating LAB software|
|200000||HV Upgrade Kit I. Includes Pfeiffer turbopump (Hi Pace 80), conversion kit and cable|
|200001||HV upgrade Kit II. Includes Pfeiffer turbopump (Hi Pace 80), Vacuubrand MD 1 VARIO-SP membrane pump, conversion kit and cable|
|300000||Sputter target gold (Au) 54 Ø x 1.0mm. Purity 99.99%|
|300017||Sputter target gold (Au) 54 Ø x 0.2mm. Purity 99.99%|
|300001||Sputter target gold/palladium (Au/Pd), 80/20, 54mm Ø x 1.0mm. Purity 99.99%|
|300002||Sputter target gold/palladium (Au/Pd), 70/30, 54mm Ø x 1.0mm. Purity 99.99%|
|300003||Sputter target gold/palladium (Au/Pd), 60/40, 54mm Ø x 1.0mm. Purity 99.99%|
|300004||Sputter target platinum (Pt), 54mm Ø x 0.2mm. Purity 99.95%|
|300005||Sputter target silver (Ag), 54mm Ø x 1.0mm. Purity 99.99%|
|300007||Sputter target nickel (Ni), 54mm Ø x 3.5mm. Purity 99.99%|
|300011||Sputter target iron (Fe), 54mm Ø x 3.5mm. Purity 99.99%|
|300013||Sputter target copper (Cu), 54mm Ø x 1.0mm. Purity 99.99%|
|300019||Sputter target platinum/Iridium (Pt/Ir), 54mm Ø x 1.0. Purity 99.95%|
|300020||Sputter target iridium (Ir), 54mm Ø x 1.0mm. Purity 99.95%|
|300021||Sputter target platinum/palladium (Pt/Pd), 54mm Ø x 0.5mm. Purity 99.99%|
|Carbon fibre cord|
|300014||Carbon fibre cord on spool (holder), 1m|
|300015||Carbon fibre cord on spool (holder), 2m|
|Spare FTM quartz crystals|
|300016||Spare FTM piezoelectric quartz crystals, gold coated. Pack of 10|
Dimensions (unpacked): L 570 x W 360 x H 350mm. 25kg
Glass cylinder: Ø 120mm (DN 100 ISO-KF compatible)
Implosion guard: Plastic splinter shield around the glass cylinder
Targets: Ø 54mm and thickness up to 3mm
Coating time: 0.5 to 990s
Coating current 10-100mA
Pumping: External rotary vacuum pump (option)
Ultimate vacuum: < 5 x 10-3 mbar (with Pfeiffer Pascal 2005 SD rotary vacuum pump)
Vacuum measurement: Pirani measuring gauge (measuring range up to 1e-3 mbar) Pirani and cold cathode measuring system
Display: 115 x 86mm, TFT graphical display
Specimen stage: Ø 80mm, height adjustment 0-50mm, tilt 0-45°
Film thickness measurement: Dual-position film thickness monitoring system. Piezoelectric crystal: frequency 6MHz, Ø 14mm, thickness 0.4mm.
Electrical: Plug C14, 90-260VAC, 47-63 Hz, 500W
Process gas connections: Process gas: Ø 6mm, venting gas: Ø 6mm, plasma gas: Ø 6mm
Rotary pump connections: Flange connection DN 25 ISO-KF
Electrical: Connector socket C13, secured with 10A therm. circuit breaker