Special offer - Delivery now £4.99 when ordered onlineSafematic CCU-010 LV standard vacuum sputter coater
Introduction
The Safematic CCU-010 LV is a standard vacuum (rotary pumped) coater primarily designed for SEM sputtering and thin film applications using non-oxidising metals, such as gold and platinum. Note that for W-SEM and FE-SEM applications the high vacuum CCU-010 HV is recommend.
A unique feature is a compact, self-contained sputtering head module which is designed for optimum ease of use and servicing. The CCU-010 LV comes as standard with a useful dual-position film thickness monitor (FTM) measurement.
The glass vacuum chamber is 120mm in diameter and includes a handy vertical graduated scale to help set the height of the specimen stage. An implosion guard with safety monitoring is also fitted. There are specimen stage options to suit most applications and and extensive range of other options - including sputtering targets and upgrades to high vacuum and to carbon evaporation.
Safematic CCU-010 LV sputter/carbon coater highlights
- Fully automatic sputter coating for SEM
- Plug-and-go, self-contained sputtering module - easy upgrade to carbon evaporation
- Routine, high quality sputtering of non-oxidising metals
- Dual location film thickness measurement as standard
- Intuitive, touch screen control - rapid data input, simple operation
- Large chamber option for samples up to 6"/152mm>
Compact, plug-in sputter coating module
The SP-010 compact sputtering module conveniently includes all the features required for high quality sputter coating - including magnetron, target, shutter, process pressure regulator, power electronics and cooling system. The CCU-010 LV plus SP-010 sputtering module is designed for applications using non-oxidising metals (e.g. Au, Au/Pd, Pt etc.). For some thin film applications where extended sputtering times are required the SP-010 sputtering module has built-in cooling, which allows continuous coating runs of up to 50 minutes without the requirement of time consuming rest periods. There is also a high sputtering rate module (SP-011) available - useful for some non-EM applications. Note that for sputtering oxidising metals the CCU-010 HV high vacuum coater is required (see: CCU-010 HV).
Dual-position film thickness monitor as standard
A dual-position film thickness monitor (FTM) measurement system is fitted as standard on the CCU-010 LV specimen stage. Conveniently positioned in the same plane as the specimens this plug-in monitoring crystal can be moved between the centre of the stage and the outside, depending on specimen size.
Vacuum pumping requirements
The CCU-010 LV requires a "backing" rotary vacuum pump. With high performance, reliability and low noise characteristics, the Edwards RV3 is ideally suited for this purpose. Please see ordering information below for further information.
High vacuum upgrade - future proving your investment
If in the future you wish to upgrade the CCU-010 LV to high vacuum CCU-010 HV specification, then this is possible using one of two upgrade kits (see: Details below for ordering information).
Specimen stages
The CCU-010 LV includes a static, but height and tilt angle adjustable, plug-in style 80mm diameter specimen stage. For specimens requiring rotation the optional RS-010 rotary stage is recommended. For specimens with very irregular surfaces, particulates and spheres, the PS-006 rotary planetary stage is available.
Large chamber option for samples up to 6" (152mm) in diameter
The LC-006 is a large chamber option that replaces the standard glass chamber and allows specimens up to 6” (152mm) to be coated. The chamber is made of aluminium therefore does not require an implosion guard.
A sample holder for 6” wafers is included, other holders can be fitted.
The LC-006 can be retrofitted to existing CCU-010 coaters.
ET-010 plasma cleaning accessory
The ET-010 plasma cleaning accessory is a fully integrated option for the Safematic CCU-010 sputter/carbon coater that is designed for the pre-treatment or post-treatment of specimens in combination with a coating process. SEM specimens can be pre-cleaned to remove light surface contamination prior to coating, without the need to breaking vacuum between cleaning and sputtering processes. Additionally,TEM carbon films can be converted from hydrophobic to hydrophilic using an air plasma.
Click here for detailed information: ET-010 plasma cleaning accessory
RC-010 remote control software - full control of the CCU-010 from a glove box
RC-010 is Windows-based RC remote control software which allows the CCU-010 to be remotely controlled and monitored, for example from a glovebox. The graphical user interface allows easy set up and selection of recipes and comes ready with pre-defined recipes with optimal settings for the most common metal sputtering targets as well as
carbon. Connection from a laptop or computer to the CCU-010 coating system is via a USB cable.
Minimum system requirements:
Windows 10, Windows 8.1, Windows 8, Windows 7 SP1, Windows Vista SP2, Pentium 366 MHz or higher, minimum 512MB of RAM, screen resolution 1024x768 or higher, USB 2.0 Interface
Brochure download: RC-010 .
Coating LAB option
Offers easy access to coating and process data. The Windows software allows access to important data including pressure, current, voltage, coating rate, coating thickness and specimen temperature as real-time curves. The coater is connected to a PC using an integrated USB interface, whilst the Coating LAB automatically establishes a connection to the coater. Password protected tools for configuring the system and updating the firmware are included. For further information see: Coating LAB.
HS-010 head module vacuum storage box
The HS-010 is a compact vacuum storage box which allows a second CCU-010 coating head for the CCU-010 module, additional planetary or rotary stage and the full range of sputtering targets and carbon thread clean and under vacuum when not in use.
For further information please see: HS-010 vacuum storage box.
Choosing a coater configuration and sputtering targets
Need help selecting a coater, options and sputtering targets to suit your requirements? Then please see: coater selection guide.
Learn more about the unique carbon sputtering and carbon modules...
CT-010 carbon evaporation module
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Put us to the test |
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Ordering information
CCU-010 base unit
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 The Safematic CCU-010 LV standard vacuum coater is suitable for SEM sputter coating with non-oxidising (noble) metals and carbon coating applications. Requires coating module/modules and rotary pump. |
CCU-010 sputtering module and etch options
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 Plasma cleaning accessory for the Safematic CCU-010 sputter/carbon coater for the pre-treatment or after-treatment of specimens in combination with a coating process |
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 Advanced, plug-in sputtering head module with built-in cooling for optimum performance (for very fast sputtering rates see: 100012) |
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 For applications requiring very fast sputtering rates |
Large chamber option for samples up to 6" (152mm) in diameter
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 The LC-006 is a large chamber option that replaces the standard glass chamber and allows specimens up to 6” (152mm) to be coated. The chamber is made of aluminium therefore does not require an implosion guard. The LC-006 includes a sample holder for 6” wafers, but other holders can be fitted. |
CCU-010 specimen stages
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 Height and angle adjustable 80mm diameter specimen stage with variable rotation. |
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 Microscope slide stage for Safematic CCU-010 coater, 76 x 26mm or one slide 76 x 52mm. Twelve M2 threaded holes for S-clips (not included see: 12-000900) |
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 For use with the PS-006 planetary gear stage.
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 Consisting of: base plate for connection to the tilt and height adjustable specimen table of the CCU-010 basic unit. Sample holders for six large (Ø 25.4mm) or six small (Ø12.7mm) SEM pin stubs. DC-micro motor for rotation and planetary movement, quartz sensor (centre), speed control: 0-100%, rotation: 0-20rpm approximately, planets: 0-65rpm approximately |
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 5 each EM-Tec copper alloy S-Clips with 5 each brass M2x3mm screws (pkg/5) |
CCU-010 Remote software control, Coating LAB and vacuum storage
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 Window-based software offering easy access to coating and process data: pressure, current, voltage, coating rate, coating thickness and specimen temperature |
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 A compact vacuum storage system for CCU-010 head modules and other accessories. Can be pumped by the coater or separate rotary pump (not supplied) |
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 Windows-based RC-010 remote control software allows Safematic CCU-010 coaters to be run remotely for the control, monitor and analyse of coating processes, for example, in a glove box. The graphical user interface facilitates the easy set up and selection of recipes. The RC-010 tool also comes ready with pre-defined recipes with optimal settings for the most common metal sputtering targets as well as carbon. |
Pumping options
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 The Edwards EMF10 filter captures oil mist from the outlet of pumps, which would otherwise be ejected into the atmosphere. The EMF10 mist filter is suitable for use with Edward RV3, RV5 and RV8 vacuum pumps. They are very efficient at 99.999% DOP test and are also azide proof. Supplied with a NW25 clamp, centering ring and ‘O’ ring, NW25 to 3/4 inch BSP adaptor. |
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 Pumping speed: 3.3 m3h-1 (50hz). The RV3 oil-sealed rotary vane pumps delivers excellent ultimate vacuum pressure, high pumping speeds and superior vapour handling capabilities with quiet operation. Requires an EMF10 mist filter (A4622600) |
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 Edwards nXDS6i dry scroll vacuum pump. Peak pumping speed: 6.2 m3h-1 . Suitable for applications where oil-based rotary pumps need to be avoided. |
Sputtering targets - please select your preferred metal/metals.
Note: oxidising metals can only be sputtered with a high vacuum coater, see: CCU-010 HV
Gold sputter targets
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 Gold sputter coater target Ø 54 x 1.0mm thick, purity 99.99%, Au |
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Sputtering target, gold (Au) Ø 54 x 0.2mm purity 99.99% (each) |
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Gold sputter coater target, Ø54 x 0.1mm disc, 99.99% Au |
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Gold sputtering target, dia.54 x 0.3mm, disc, 99.99% Au (each) |
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Gold sputtering target, dia.54 x 0.4mm, disc, 99.99% Au (each) |
Gold palladium sputter targets
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 Sputtering target, gold/palladium 80/20 (Au/Pd) Ø 54 x 1.0mm purity 99.99% (each) |
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Sputter target gold palladium 70/30 (Au/Pd) Ø 54 x 1 mm purity 99.99% (each) |
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Sputter target gold palladium 60/40 (Au/Pd) Ø 54 x 1.0 mm purity 99.99% (each) |
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Gold/Palladium sputter coater target, Ø54 x 0.1mm disc, 60/40 Au/Pd, 99.99% Au/Pd |
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Gold/Palladium sputter coater target, Ø54 x 0.1mm disc, 80/20 Au/Pd, 99.99% Au/Pd |
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Gold/Palladium coater target, Ø54 x 0.2mm disc, 60/40 Au/Pd, 99.99% Au/Pd |
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Gold/Palladium sputter coater target, Ø54 x 0.2mm disc, 80/20 Au/Pd, 99.99% Au/Pd |
Platinum sputter targets
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 Sputtering target, platinum (Pt) Ø 54 x 0.2mm purity 99.95% (each) |
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Platinum coater target, Ø54 x 0.1mm disc, 99.99% Pt |
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Other sputter targets
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 Sputtering target, silver (Ag) Ø 54 x 1 mm purity 99.99% (each) |
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 Sputtering target, Iron (Fe) Ø 54 x 0.35mm purity 99.9% (each) |
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 Sputter target, copper (Cu) Ø 54 x 1.0mm purity 99.99% (each) |
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 Sputtering target, platinum/iridium (Pt/Ir) Ø 54 x 1.0mm purity 99.95% (each) |
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 Sputtering target platinum/palladium (Pt/Pd) Ø 54 x 0.5mm purity 99.95% (each) |
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 Palladium sputter coater target, Ø54 x 0.1mm disc, 99.99% Pd |