TEM-CUBE
High vacuum TEM specimen holder storage, leak checker and plasma cleaning chamber
Featuring
- Large vacuum 22.86cm x 22.86cm (9” X 9”) vacuum chamber
- Storage of up to eight TEM specimen rods
- Option to fit EM-KLEEN plasma cleaner
- High vacuum and standard vacuum options
- Hinged front door with a glass observation window
- Cleaning SEM and TEM components (EM-KLEEN needed)
- Vacuum storage of specimens, components etc.
- Compact, space-saving design
TEM-CUBE can be used to store up to eight TEM specimen holders under a high vacuum (ultimate vacuum in the mid-10-7Torr range). The vacuum level is high enough for leaking checking of the in-situ TEM chips. TEM-CUBE can also be fitted with a remote EM-KLEEN plasma source to perform plasma cleaning in the chamber. The chamber is a 22.86cm x 22.86cm (9” X 9”) cube and can accommodate large TEM and SEM specimens and components. The chamber has a glass front door for observation.
The standard pumping configuration is to place the chamber directly on top of a Pfeiffer turbo pump station (see option: PIE-HVS101). If high vacuum is not required the chamber can be pumped using a dry scroll pump, such as the Edwards nXDSi6 (A73501983).
Comparison between TEM-CUBE and TEM rod storage system and Tergeo-EM plasma cleaner
In comparison with our regular TEM rod storage system, each storage port on the TEM-CUBE cannot be individually vented or pumped because all the storage ports shares the same vacuum chamber. It therefore takes a little longer to retrieve a TEM specimen holder as the whole chamber must be vented.
TEM-CUBE can be used for plasma cleaning TEM specimen holders and specimens, if the EM-KLEEN (PIE-EM100) plasma source is installed on the chamber. The EM-KLEEN plasma source has a single gas input, whereas the standalone Tergeo-EM plasma cleaner can take up to three process gasses. The venting and pumping time with TEM-CUBE is also longer than the Tergeo-EM plasma cleaner. Tergeo-EM also has fully automatic operation with a higher level of system integration.
To configure a fully working system for plasma cleaning requires:
- TEM-CUBE
- Vacuum pump of your choice (click here for pump options)
- EM-KLEEN plasma cleaner (click here)
- Your choice of TEM rod adaptors (if required)